NESHAP for Semiconductor Manufacturing (40 CFR part 63, Subpart BBBBB) (Renewal)

The National Emission Standards for Hazardous Air Pollutants (NESHAP) for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) were proposed on May 8, 2002, and promulgated on May 22, 2003. These regulations apply to existing facilities and new facilities that emits or has the potential to emit, considering controls, in the aggregate, any single hazardous air pollutants (HAP) at a rate of 10 tons per year (tpy) or more or any combination of HAP at a rate of 25 tpy or more. New facilities include those that commenced construction, modification or reconstruction after the date of proposal. This information is being collected to assure compliance with 40 CFR Part 63, Subpart BBBBB. In general, all NESHAP standards require initial notifications, performance tests, and periodic reports by the owners/operators of the affected facilities. They are also required to maintain records of the occurrence and duration of any startup, shutdown, or malfunction in the operation of an affected facility, or any period during which the monitoring system is inoperative. These notifications, reports, and records are essential in determining compliance, and are required of all affected facilities subject to NESHAP.

The latest form for NESHAP for Semiconductor Manufacturing (40 CFR part 63, Subpart BBBBB) (Renewal) expires 2022-05-31 and can be found here.