NESHAP for Semiconductor Manufacturing (40 CFR part 63, Subpart BBBBB)(Renewal)

ICR 200906-2060-004

OMB: 2060-0519

Federal Form Document

Forms and Documents
Document
Name
Status
Supporting Statement A
2009-06-02
IC Document Collections
ICR Details
2060-0519 200906-2060-004
Historical Active 200606-2060-014
EPA/OAR 2042.04
NESHAP for Semiconductor Manufacturing (40 CFR part 63, Subpart BBBBB)(Renewal)
Extension without change of a currently approved collection   No
Regular
Approved without change 07/31/2009
Retrieve Notice of Action (NOA) 06/10/2009
  Inventory as of this Action Requested Previously Approved
07/31/2012 36 Months From Approved 08/31/2009
2 0 2
37 0 37
50 0 0

The subject applies to each owner or operator of semiconductor manufacturing process units used to manufactur p-type and a-type semiconductors and active solid-state devices from a wafer substrate, including research and development activities integrated into a semiconductor manufacturing process unit.

None
None

Not associated with rulemaking

  73 FR 31088 05/30/2008
74 FR 27530 06/10/2009
No

1
IC Title Form No. Form Name
NESHAP for Semiconductor manufacturing (40 CFR part 63, Subpart BBBBB)(Renewal)

  Total Approved Previously Approved Change Due to New Statute Change Due to Agency Discretion Change Due to Adjustment in Estimate Change Due to Potential Violation of the PRA
Annual Number of Responses 2 2 0 0 0 0
Annual Time Burden (Hours) 37 37 0 0 0 0
Annual Cost Burden (Dollars) 50 0 0 0 50 0
No
No

$1,428
No
No
Uncollected
Uncollected
No
Uncollected
Learia Williams 202 564-4113 [email protected]

  No

On behalf of this Federal agency, I certify that the collection of information encompassed by this request complies with 5 CFR 1320.9 and the related provisions of 5 CFR 1320.8(b)(3).
The following is a summary of the topics, regarding the proposed collection of information, that the certification covers:
 
 
 
 
 
 
 
    (i) Why the information is being collected;
    (ii) Use of information;
    (iii) Burden estimate;
    (iv) Nature of response (voluntary, required for a benefit, or mandatory);
    (v) Nature and extent of confidentiality; and
    (vi) Need to display currently valid OMB control number;
 
 
 
If you are unable to certify compliance with any of these provisions, identify the item by leaving the box unchecked and explain the reason in the Supporting Statement.
06/10/2009


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