CHIPS Streamlined Supply Chain Information Collection Request

The CHIPS Incentives Program Facilities for Semiconductor Materials and Manufacturing Equipment Notice of Funding Opportunity (NOFO) seeks applications that will support investments in the construction, expansion, or modernization of commercial facilities in the United States for semiconductor materials and manufacturing equipment for which the capital investment falls below $300 million. This NOFO seeks applications in the following categories. Semiconductor Materials Facilities for the manufacture or production, including growth or extraction, of materials used to manufacture semiconductors, which are the chemicals, gases, raw and intermediate materials, and other consumables used in semiconductor manufacturing. Specific examples include but are not limited to polysilicon; photoresists and ancillaries (developers, strippers, litho solvents, and anti-reflective and hardmask layers); sputtering targets (including tantalum, titanium, and aluminum); and materials specifically used in quantum information systems (such as hafnium and niobium). Semiconductor Manufacturing Equipment Facilities for the physical production of specialized equipment integral to the manufacturing of semiconductors and subsystems that enable or are incorporated into the manufacturing equipment. Specific examples of semiconductor manufacturing equipment include but are not limited to deposition equipment, including chemical vapor deposition, physical vapor deposition, and atomic layer deposition; etching equipment (wet etch, dry etch); lithography equipment (steppers, scanners, extreme ultraviolet); wafer slicing equipment, wafer dicing equipment, and wire bonders; inspection and measuring equipment, including scanning electron microscopes, atomic force microscopes, optical inspection systems, and wafer probes; certain metrology and inspection systems; and ion implantation and diffusion/oxidation furnaces.

The latest form for CHIPS Streamlined Supply Chain Information Collection Request expires 2026-11-30 and can be found here.

CHIPS Streamlined Supply Chain Concept Plan

Federal Enterprise Architecture: Economic Development - Business and Industry Development